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OSRAM HBO 1000 W/D — mercury short-arc lamp, 1 kW

Mask aligners

Rated power1000 W
Lamp voltage37.7 V
Lamp current26.5 A
Arc gap (cold)3 mm
Overall length240 / 206 mm
Bulb diameter40 mm
Base / connectionSFc 16-6/25 both ends
Burn positionvertical, anode up; convection cooled
Rated life600 h
ApplicationMask aligners
–+cathodeanodeOverall length A = 240 mmLight centre length BBulb ØD = 40 mmArc gap G = 3 mm
OSRAM HBO 1000 W/D — Schematic, not to scale. Dimensions shown are the published values for this part number. The light-centre reference end differs between lamp types; confirm against the original drawing.

Need a HBO 1000 W/D replacement?

Send the part number and your exposure tool model. We check power, base, dimensions and burn position against the original and quote within 24 hours.

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Equipment this lamp is published for

SUSS MA150SUSS MA200SUSS MA4SUSS MA6SUSS MA8

Lamps with closely matching published data

Same power class and voltage/current within a few percent. This is not a statement of interchangeability — base, cable, length and light-centre length must also match your lamphouse. Send us both part numbers and we will check.

Part numberPowerVoltageCurrentØ mmLength mm
USHIO USH-1005D1000 W38±4 V28 A40240 (with nuts) / 206
Advanced Radiation HSA-1000 KS1000 W38 V26.3 A38206

Other mercury lamps of similar power

USHIO USH-1005DAdvanced Radiation HSA-1000 KS

Frequently asked

What is the OSRAM HBO 1000 W/D used for?

It is a 1000 W super-high-pressure mercury short-arc lamp used for mask aligners, published for SUSS MA150, SUSS MA200, SUSS MA4, SUSS MA6, SUSS MA8.

Can you supply a replacement for the OSRAM HBO 1000 W/D?

Send us the part number, a photo of the lamp label and your exposure tool model. We match power, voltage, current, base, cable, overall length and light-centre length against the original before we quote, and state warranty hours on the quote.

How often should an exposure mercury lamp be replaced?

Typical rated life for high-power lithography and exposure lamps is 500 to 2,250 hours depending on type. UV output falls and arc stability degrades with age, which shows up as longer exposure times and non-uniformity, so plan replacement at rated life.

Safety: mercury short-arc lamps are under high pressure and contain mercury. Handle with face shield and gloves, keep the protective cover on until installed, and return used lamps for mercury recycling.

Specifications as published in: OSRAM HBO microlithography technical guide, 1999/2000 edition (source). Older types may be discontinued by the manufacturer; data is given for identification only. Lamps supplied by Kilowatt Lamps are compatible replacements and are not made by or affiliated with OSRAM.

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