KILOWATTLAMPS
Cross referenceBy equipmentBrandsMercury lampsExposure lampsMarketsGuidesGet a quote
Home › Mercury short-arc lamps › HBO 1500 W/PIL

OSRAM HBO 1500 W/PIL — mercury short-arc lamp, 1.5 kW

i-line wafer steppers

Rated power1500 W
Lamp voltage23 V
Lamp current65.2 A
Arc gap (cold)4 mm
Overall length273 / 240 mm
Bulb diameter46 mm
Base / connectioncathode SFc 27-10/35; anode SFc 30-6/25 with cooling fins and M8 cable
Burn positionvertical, anode underneath; forced base cooling
Rated life1500 h
Applicationi-line wafer steppers
–+cathodeanodeOverall length A = 273 mmLight centre length BBulb ØD = 46 mmArc gap G = 4 mm
OSRAM HBO 1500 W/PIL — Schematic, not to scale. Dimensions shown are the published values for this part number. The light-centre reference end differs between lamp types; confirm against the original drawing.

Need a HBO 1500 W/PIL replacement?

Send the part number and your exposure tool model. We check power, base, dimensions and burn position against the original and quote within 24 hours.

Quote form

Equipment this lamp is published for

ASML PAS 5500/100CASML PAS 5500/100DASML TFH 100

Lamps with closely matching published data

Same power class and voltage/current within a few percent. This is not a statement of interchangeability — base, cable, length and light-centre length must also match your lamphouse. Send us both part numbers and we will check.

Part numberPowerVoltageCurrentØ mmLength mm
OSRAM HBO 1500 W/PI1500 W23 V65 A46263 / 240

Other mercury lamps of similar power

OSRAM HBO 1500 W/PIOSRAM HBO 1500 W/CIEL

Frequently asked

What is the OSRAM HBO 1500 W/PIL used for?

It is a 1500 W super-high-pressure mercury short-arc lamp used for i-line wafer steppers, published for ASML PAS 5500/100C, ASML PAS 5500/100D, ASML TFH 100.

Can you supply a replacement for the OSRAM HBO 1500 W/PIL?

Send us the part number, a photo of the lamp label and your exposure tool model. We match power, voltage, current, base, cable, overall length and light-centre length against the original before we quote, and state warranty hours on the quote.

How often should an exposure mercury lamp be replaced?

Typical rated life for high-power lithography and exposure lamps is 500 to 2,250 hours depending on type. UV output falls and arc stability degrades with age, which shows up as longer exposure times and non-uniformity, so plan replacement at rated life.

Safety: mercury short-arc lamps are under high pressure and contain mercury. Handle with face shield and gloves, keep the protective cover on until installed, and return used lamps for mercury recycling.

Specifications as published in: OSRAM/Sylvania HBO microlithography technical guide, 2000/2001 edition (source). Older types may be discontinued by the manufacturer; data is given for identification only. Lamps supplied by Kilowatt Lamps are compatible replacements and are not made by or affiliated with OSRAM.

WhatsApp quote