Base / connectioncathode SFc 30-6.5/50; anode SFa 30-6/50 with M10 cable
Burn positionvertical, anode up; forced base cooling
Rated life1500 h
Applicationi-line wafer steppers
OSRAM HBO 2500 W/PIL — Schematic, not to scale. Dimensions shown are the published values for this part number. The light-centre reference end differs between lamp types; confirm against the original drawing.
Need a HBO 2500 W/PIL replacement?
Send the part number and your exposure tool model. We check power, base, dimensions and burn position against the original and quote within 24 hours.
It is a 2500 W super-high-pressure mercury short-arc lamp used for i-line wafer steppers, published for ASML PAS 5500/200.
Can you supply a replacement for the OSRAM HBO 2500 W/PIL?
Send us the part number, a photo of the lamp label and your exposure tool model. We match power, voltage, current, base, cable, overall length and light-centre length against the original before we quote, and state warranty hours on the quote.
How often should an exposure mercury lamp be replaced?
Typical rated life for high-power lithography and exposure lamps is 500 to 2,250 hours depending on type. UV output falls and arc stability degrades with age, which shows up as longer exposure times and non-uniformity, so plan replacement at rated life.
Safety: mercury short-arc lamps are under high pressure and contain mercury. Handle with face shield and gloves, keep the protective cover on until installed, and return used lamps for mercury recycling.
Specifications as published in: OSRAM/Sylvania HBO microlithography technical guide, 2000/2001 edition (source). Older types may be discontinued by the manufacturer; data is given for identification only. Lamps supplied by Kilowatt Lamps are compatible replacements and are not made by or affiliated with OSRAM.