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Home › Mercury short-arc lamps › HBO 3501 W/PI

OSRAM HBO 3501 W/PI — mercury short-arc lamp, 3.4 kW

i-line wafer steppers

Rated power3400 W
Lamp voltage23 V
Lamp current148 A
Arc gap (cold)4.5 mm
Overall length340–360 / 312.5 mm
Bulb diameter77 mm
Base / connectioncathode SFc 32.5-6.7/50; anode SfaX 40-6/50 with M10 cable
Burn positionvertical, anode up
Rated life850 (PIL version 1500) h
Applicationi-line wafer steppers
–+cathodeanodeOverall length A = 340 mmLight centre length BBulb ØD = 77 mmArc gap G = 4.5 mm
OSRAM HBO 3501 W/PI — Schematic, not to scale. Dimensions shown are the published values for this part number. The light-centre reference end differs between lamp types; confirm against the original drawing.

Need a HBO 3501 W/PI replacement?

Send the part number and your exposure tool model. We check power, base, dimensions and burn position against the original and quote within 24 hours.

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Equipment this lamp is published for

ASML PAS 5500/400

Lamps with closely matching published data

Same power class and voltage/current within a few percent. This is not a statement of interchangeability — base, cable, length and light-centre length must also match your lamphouse. Send us both part numbers and we will check.

Part numberPowerVoltageCurrentØ mmLength mm
OSRAM HBO 3500 W/PIL3400 W23 V148 A77360 / 312.5
OSRAM HBO 3500 W/PI3400 W23 V148 A77340 / 312.5

Other mercury lamps of similar power

USHIO USH-3502MAOSRAM HBO 3500 W/PILOSRAM HBO 3500 W/PIOSRAM HBO 3500 W/MROSRAM HBO 3500 W/HKAdvanced Radiation HSA-3500 TAM

Frequently asked

What is the OSRAM HBO 3501 W/PI used for?

It is a 3400 W super-high-pressure mercury short-arc lamp used for i-line wafer steppers, published for ASML PAS 5500/400.

Can you supply a replacement for the OSRAM HBO 3501 W/PI?

Send us the part number, a photo of the lamp label and your exposure tool model. We match power, voltage, current, base, cable, overall length and light-centre length against the original before we quote, and state warranty hours on the quote.

How often should an exposure mercury lamp be replaced?

Typical rated life for high-power lithography and exposure lamps is 500 to 2,250 hours depending on type. UV output falls and arc stability degrades with age, which shows up as longer exposure times and non-uniformity, so plan replacement at rated life.

Safety: mercury short-arc lamps are under high pressure and contain mercury. Handle with face shield and gloves, keep the protective cover on until installed, and return used lamps for mercury recycling.

Specifications as published in: OSRAM/Sylvania HBO microlithography technical guide, 2000/2001 edition (source). Older types may be discontinued by the manufacturer; data is given for identification only. Lamps supplied by Kilowatt Lamps are compatible replacements and are not made by or affiliated with OSRAM.

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