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OSRAM HBO 2002 W/MA — mercury short-arc lamp, 2 kW

Projection mask aligners (semiconductor and LCD)

Rated power2000 W
Lamp voltage37 V
Lamp current54 A
Arc gap (cold)3 mm
Overall length292 / 270 mm
Bulb diameter62 mm
Base / connectioncathode SFa 27-10/35, anode SFa 27/35, both with M8 cable
Burn positionvertical, anode underneath
Rated life1000 h
ApplicationProjection mask aligners (semiconductor and LCD)
–+cathodeanodeOverall length A = 292 mmLight centre length BBulb ØD = 62 mmArc gap G = 3 mm
OSRAM HBO 2002 W/MA — Schematic, not to scale. Dimensions shown are the published values for this part number. The light-centre reference end differs between lamp types; confirm against the original drawing.

Need a HBO 2002 W/MA replacement?

Send the part number and your exposure tool model. We check power, base, dimensions and burn position against the original and quote within 24 hours.

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Equipment this lamp is published for

Canon MPA-500Canon MPA-501Canon MPA-600 SuperCanon MPA-1500

Lamps with closely matching published data

Same power class and voltage/current within a few percent. This is not a statement of interchangeability — base, cable, length and light-centre length must also match your lamphouse. Send us both part numbers and we will check.

Part numberPowerVoltageCurrentØ mmLength mm
USHIO USH-2004MB2000 W37 V54 A62347 (with nuts) / 270

Other mercury lamps of similar power

USHIO USH-2004MBUSHIO USH-2002MAOSRAM HBO 2001 W/CILOSRAM HBO 2000 W/NILOSRAM HBO 2001 W/NIELOSRAM HBO 2002 W/NILOSRAM HBO 2011 W/NILAdvanced Radiation HSA-2002 TAM

Frequently asked

What is the OSRAM HBO 2002 W/MA used for?

It is a 2000 W super-high-pressure mercury short-arc lamp used for projection mask aligners (semiconductor and lcd), published for Canon MPA-500, Canon MPA-501, Canon MPA-600 Super, Canon MPA-1500.

Can you supply a replacement for the OSRAM HBO 2002 W/MA?

Send us the part number, a photo of the lamp label and your exposure tool model. We match power, voltage, current, base, cable, overall length and light-centre length against the original before we quote, and state warranty hours on the quote.

How often should an exposure mercury lamp be replaced?

Typical rated life for high-power lithography and exposure lamps is 500 to 2,250 hours depending on type. UV output falls and arc stability degrades with age, which shows up as longer exposure times and non-uniformity, so plan replacement at rated life.

Safety: mercury short-arc lamps are under high pressure and contain mercury. Handle with face shield and gloves, keep the protective cover on until installed, and return used lamps for mercury recycling.

Specifications as published in: OSRAM HBO microlithography technical guide, 1999/2000 edition (source). Older types may be discontinued by the manufacturer; data is given for identification only. Lamps supplied by Kilowatt Lamps are compatible replacements and are not made by or affiliated with OSRAM.

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