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Home › Mercury short-arc lamps › HBO 2001 W/NIEL

OSRAM HBO 2001 W/NIEL — mercury short-arc lamp, 1.75 kW

i-line wafer steppers

Rated power1750 W
Lamp voltage26 V
Lamp current67 A
Arc gap (cold)4.5 mm
Overall length251 / 229 mm
Bulb diameter52 mm
Base / connectioncathode SFaX 27-7/35 with M8 cable; anode SFc 27-10/35
Burn positionvertical, anode underneath; forced base cooling
Rated life2250 h
Applicationi-line wafer steppers
–+cathodeanodeOverall length A = 251 mmLight centre length BBulb ØD = 52 mmArc gap G = 4.5 mm
OSRAM HBO 2001 W/NIEL — Schematic, not to scale. Dimensions shown are the published values for this part number. The light-centre reference end differs between lamp types; confirm against the original drawing.

Need a HBO 2001 W/NIEL replacement?

Send the part number and your exposure tool model. We check power, base, dimensions and burn position against the original and quote within 24 hours.

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Equipment this lamp is published for

Nikon NSR-2005 i9CNikon NSR-2005 i10Nikon NSR-2205 i11CNikon NSR-2205 i11D

Lamps with closely matching published data

Same power class and voltage/current within a few percent. This is not a statement of interchangeability — base, cable, length and light-centre length must also match your lamphouse. Send us both part numbers and we will check.

Part numberPowerVoltageCurrentØ mmLength mm
OSRAM HBO 2000 W/NIL1750 W26 V67 A52241 / 219
OSRAM HBO 2002 W/NIL1750 W26 V67 A52254 / 232

Other mercury lamps of similar power

USHIO USH-2004MBUSHIO USH-2002MAOSRAM HBO 1500 W/PILOSRAM HBO 1500 W/PIOSRAM HBO 1500 W/CIELOSRAM HBO 2001 W/CILOSRAM HBO 2002 W/MAOSRAM HBO 2000 W/NILOSRAM HBO 2002 W/NILOSRAM HBO 2011 W/NILAdvanced Radiation HSA-2002 TAM

Frequently asked

What is the OSRAM HBO 2001 W/NIEL used for?

It is a 1750 W super-high-pressure mercury short-arc lamp used for i-line wafer steppers, published for Nikon NSR-2005 i9C, Nikon NSR-2005 i10, Nikon NSR-2205 i11C, Nikon NSR-2205 i11D.

Can you supply a replacement for the OSRAM HBO 2001 W/NIEL?

Send us the part number, a photo of the lamp label and your exposure tool model. We match power, voltage, current, base, cable, overall length and light-centre length against the original before we quote, and state warranty hours on the quote.

How often should an exposure mercury lamp be replaced?

Typical rated life for high-power lithography and exposure lamps is 500 to 2,250 hours depending on type. UV output falls and arc stability degrades with age, which shows up as longer exposure times and non-uniformity, so plan replacement at rated life.

Safety: mercury short-arc lamps are under high pressure and contain mercury. Handle with face shield and gloves, keep the protective cover on until installed, and return used lamps for mercury recycling.

Specifications as published in: OSRAM HBO microlithography technical guide, 1999/2000 edition (source). Older types may be discontinued by the manufacturer; data is given for identification only. Lamps supplied by Kilowatt Lamps are compatible replacements and are not made by or affiliated with OSRAM.

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