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USHIO USH-2002MA — mercury short-arc lamp, 2 kW

Projection mask aligners (semiconductor and LCD)

Rated power2000 W
Overall length284 mm
Bulb diameter61 mm
Rated life1000 h
ApplicationProjection mask aligners (semiconductor and LCD)
–+cathodeanodeOverall length A = 284 mmLight centre length BBulb ØD = 61 mmArc gap G
USHIO USH-2002MA — Schematic, not to scale. Dimensions shown are the published values for this part number. The light-centre reference end differs between lamp types; confirm against the original drawing.

Need a USH-2002MA replacement?

Send the part number and your exposure tool model. We check power, base, dimensions and burn position against the original and quote within 24 hours.

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Equipment this lamp is published for

Canon MPA-500Canon MPA-501Canon MPA-600 SuperCanon MPA-1500

Other mercury lamps of similar power

USHIO USH-2004MBOSRAM HBO 2001 W/CILOSRAM HBO 2002 W/MAOSRAM HBO 2000 W/NILOSRAM HBO 2001 W/NIELOSRAM HBO 2002 W/NILOSRAM HBO 2011 W/NILAdvanced Radiation HSA-2002 TAM

Frequently asked

What is the USHIO USH-2002MA used for?

It is a 2000 W super-high-pressure mercury short-arc lamp used for projection mask aligners (semiconductor and lcd), published for Canon MPA-500, Canon MPA-501, Canon MPA-600 Super, Canon MPA-1500.

Can you supply a replacement for the USHIO USH-2002MA?

Send us the part number, a photo of the lamp label and your exposure tool model. We match power, voltage, current, base, cable, overall length and light-centre length against the original before we quote, and state warranty hours on the quote.

How often should an exposure mercury lamp be replaced?

Typical rated life for high-power lithography and exposure lamps is 500 to 2,250 hours depending on type. UV output falls and arc stability degrades with age, which shows up as longer exposure times and non-uniformity, so plan replacement at rated life.

Safety: mercury short-arc lamps are under high pressure and contain mercury. Handle with face shield and gloves, keep the protective cover on until installed, and return used lamps for mercury recycling.

Specifications as published in: lampes-et-tubes.info lamp archive / ARC HSA catalogue (source). Older types may be discontinued by the manufacturer; data is given for identification only. Lamps supplied by Kilowatt Lamps are compatible replacements and are not made by or affiliated with USHIO.

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